FEI Quanta 200 ESEM

The Electron Microscopy Laboratory recently acquired a unique scanning electron microscope (SEM) for characterization. The FEI Quanta ESEM is capable of running at low vacuum, thus reducing charging on insulating samples and allowing imaging without applying a conductive coating.

The W filament allows for a resolution of 3 nm in high vacuum or low vacuum. Water introduction and a Peltier cooling stage allows for liquid water to be present in the samples, or liquid water to be deposited on the sample surface for high resolution contact angle measurements.

The system is also configured with an EDAX (TSL) EDS / EBSD system for phase identification at high pressures.

Finally, the system can be configured with a 1000°C hot stage or a 1500°C hot stage, allowing for characterization at 10nm resolution and high temperatures without requiring a conductive sample or coating.


Instrument Specifications


  • High-vacuum
    • 3.0nm at 30kV (SE)
    • 4.0nm at 30kV (BSE)
    • 10nm at 3kV (SE)
  • Low-vacuum
    • 3.0nm at 30kV (SE)
    • 4.0nm at 30kV (BSE)
    • < 12nm at 3kV (SE)
  • Extended vacuum mode (ESEM)
    • 3.0nm at 30kV (SE)
  • Accelerating voltage: 200V – 30kV
  • Probe current: up to 2μA – Continuously adjustable


  • 284mm left to right
  • 10mm analytical WD
  • EDX take-off angle: 35°

4-Axis Motorized Stage

  • Eucentric goniometer stage
  • X,Y = 50mm
  • Z = 50mm (25mm motorised)
  • T = -15° to +75° (manual)
  • R = 360° continuous
  • Repeatability: 2μm


  • Everhardt-Thornley SED
  • Low-vacuum SED (LFD)
  • Gaseous SED (GSED)
  • Solid-state BSED

Equipped with

  • EDAX Sapphire Si(Li) Detecting Unit, 30 mm2 detector crystal, Genesis software
  • TSL Digiview III Electron Backscatter Diffraction (EBSD) detector, OIM™ software
  • SW controlled Peltier cooled specimen stage (-18 to 90°C)
  • SW controlled 1000°C heating stage
  • SW controlled 1500°C heating stage

Chamber Vacuum

  • High-vacuum: < 6e-4 Pa
  • Low-vacuum: 10 to 130 Pa
  • ESEM-vacuum: 10 to 2600 Pa