FEI Quanta 200 ESEM

The Electron Microscopy Laboratory recently acquired a unique scanning electron microscope (SEM) for characterization. The FEI Quanta ESEM is capable of running at low vacuum, thus reducing charging on insulating samples and allowing imaging without applying a conductive coating.

The W filament allows for a resolution of 3 nm in high vacuum or low vacuum. Water introduction and a Peltier cooling stage allows for liquid water to be present in the samples, or liquid water to be deposited on the sample surface for high resolution contact angle measurements.

The system is also configured with an EDAX EDS system for element and phase identification at high pressures.

Finally, the system can be configured with a 1000°C hot stage or a 1500°C hot stage, allowing for characterization at 10nm resolution and high temperatures without requiring a conductive sample or coating.

Instrument Specifications

Resolution

High-vacuum
- 3.0nm at 30kV (SE)
- 4.0nm at 30kV (BSE)
- 10nm at 3kV (SE)
Low-vacuum
- 3.0nm at 30kV (SE)
- 4.0nm at 30kV (BSE)
- < 12nm at 3kV (SE)
Extended vacuum mode (ESEM)
- 3.0nm at 30kV (SE)
Accelerating voltage: 200V - 30kV
Probe current: up to 2μA - Continuously adjustable

Chamber

284mm left to right
10mm analytical WD
EDX take-off angle: 35°

4-Axis Motorized Stage

Eucentric goniometer stage
X,Y = 50mm
Z = 50mm (25mm motorised)
T = -15° to +75° (manual)
R = 360° continuous
Repeatability: 2μm

Detectors

Everhardt-Thornley SED
Low-vacuum SED (LFD)
Gaseous SED (GSED)
Solid-state BSED

Equipped with

EDAX Element SDD, 25mm² Si₃N₄ window, TEAM software
SW controlled Peltier cooled specimen stage (-18 to 90°C)
SW controlled 1000°C heating stage
~~TSL Digiview III Electron Backscatter Diffraction (EBSD) detector, OIM™ software~~ [Currently Unavailable]
~~SW controlled 1500°C heating stage~~ [Currently Unavailable]

Chamber Vacuum

High-vacuum: < 6e-4 Pa
Low-vacuum: 10 to 130 Pa
ESEM-vacuum: 10 to 2600 Pa