A Model 670xi Scanning Auger Nanoprobe was purchased from Physical Electronics in February of 2008.
The Model 670xi Scanning Auger has full analytical capability including secondary electron imaging, multiple Auger point, line and area analyses, Auger imaging, depth-compositional analysis, backscattered electron imaging and automated multi-location analysis.
The system uses a coaxial cylindrical mirror analyzer to minimize analytical shadowing and maximize sensitivity. The differentially pumped Schottky field emission electron gun provides high spatial resolution and an analysis energy range from 1-25keV. A 5 kV differentially pumped Argon ion gun with regulated leak valve is available for specimen cleaning depth profiling, and neutralization.
The system was retired from service in December 2021.
Electron Gun Specifications
Cylindrical Mirror Analyzer (CMA)