About the Cleanroom

UNT’S NANOFABRICATION CLEANROOM IS AN ADVANCED RESEARCH FACILITY EQUIPPED WITH AN EXTENSIVE SET OF INSTRUMENTS FOR NANO- AND MICRO-DEVICE FABRICATION AND CHARACTERIZATION TO SUPPORT THE RESEARCH NEEDS OF FACULTY AND STUDENTS IN A BROAD RANGE OF ENGINEERING AND SCIENCE DISCIPLINES.

The cleanroom features about 3,000 square feet of clean space and includes a class 100 lithography area and a class 10,000
metallization wet and dry processing and characterization area. Its capabilities emphasize nano and micro-device development, biomedical, advanced materials, photomask fabrication, OLED device fabrication and thin film techniques. This open-access facility is used in a wide variety of engineering disciplines, including materials, mechanical, electrical and biomedical, along with chemistry and physics.

For information about cleanroom capabilities or other details, contact Dr. Jianchao Li, Nanofabrication Facilities Manager. More information will be posted here as it becomes available.

Updated Cleanroom Capacity examples!