Electron and Ion Microscopy
Instrument | Capabilities | Operation Modes | |
---|---|---|---|
3D Atom Probe Microscope Cameca LEAP 5000XS HR Atom Probe Microscope Room: E-178B |
Analysis of Metals, Semiconductors and Insulators 3D Atom Scale Elemental Analysis 3D Atom Scale Crystal Structure Analysis 3D Analysis of Interfaces |
Voltage Pulsed APT Laser Pulsed APT Field Ion Microscopy |
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High-Resolution Analytical TEM FEI Tecnai G2 F20 ST S/TEM Room: E-178C |
2D/3D Structural Imaging Crystal Structure Analysis Elemental Analysis/Imaging |
BF, DF, STEM BF/DF/HAADF SAED, OIM-PED EDS |
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DualBeam FIB/SEM FEI Nova 200 NanoLab FIB/SEM Room:E-178D |
2D/3D Imaging Micro-machining & Deposition Site Specific Sample Preparation 2D/3D Elemental + Crystal Structure Analysis/Imaging |
SE/BSE/SI, High-resolution SE/BSE Ga FIB, Pt GIS Nanomanipulator, Pt GIS, EBSD, EDS EBSD, EDS |
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Analytical FEG-SEM FEI Nova NanoSEM 230 Room: E-178P |
2D Imaging 2D Elemental Analysis/Imaging 2D Crystal Structure Analysis/Imaging |
SE/BSE, High-resolution SE/BSE EDS EBSD |
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Environmental SEM (ESEM) FEI Quanta 200 ESEM Room: E-178K |
2D Imaging 2D Elemental Analysis/Imaging Low pressure imaging/analysis Environmental stages |
SE, BSE EDS SE, BSE, EDS cold and hot stages |
Surface & Thin Film Analysis
Instrument | Capabilities | Operation Modes | |
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XPS Imaging Spectrometer PHI 5000 Versaprobe Scanning XPS Microprobe with UPS Room: E-178E |
UHV compatible materials Chemical Bond State Surface Spectroscopy Work Function measurements Compositional Depth Profiling |
XPS, ARXPS UPS Ar Ion Sputter Gun Five axis motorized stage |
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Spectroscopic Ellipsometer J.A. Woollam Variable Angle Spectroscopic Ellipsometer Room: E-178M |
characterize surfaces, thin films, and microstructure determine optical constants determine film thicknesses determine doping concentration |
250nm to 2200nm spectral range Heating Stage
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Scanning Probe Microscope Veeco Multimode Nanoscope III SPM with AFM, STM, MFM, SCM Room: E-178M |
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Optical Microscope Nikon Eclipse ME600 Digital Optical Microscope Room: E-178K |
X-Ray Diffraction & Tomography
Instrument | Capabilities | Operation Modes | |
---|---|---|---|
High Resolution X-ray Diffractometer (XRD) [RETIRED] Rigaku Ultima III XRD Room: E-178N |
Sample Preparation
Instrument | Capabilities | Operation Modes | |
---|---|---|---|
SEM Ion Etching & HR Coating Gatan 682 Precision Etching Coating System Room: E-178K |
Previously Managed Instruments
Imago LEAP 300X HR [RETIRED, REPLACED BY CAMECA LEAP 5000XS] | |
Philips EM420 120keV TEM [CURRENTLY MANAGED BY MTSE] | |
PHI 670xi Scanning Auger Nanoprobe [RETIRED] | |
Nicolet Almega XR Dispersive Raman spectrometer [RETIRED] | |
Nicolet 6700 Fourier Transform Infrared Spectrometer (FTIR) [RETIRED] | |
Skyscan 1172 High Resolution µ-CT 3D Imaging System [RETIRED] | |
Gatan 691 Precision Ion Polishing System [RETIRED] |