MDCL Instrumentation & Tools

Electron and Ion Microscopy

  Instrument Capabilities Operation Modes

3D Atom Probe Microscope

3D Atom Probe Microscope
Cameca LEAP 3000X HR Atom Probe Microscope
Room: E-178B
 
Analysis of Metals, Semiconductors and Insulators
3D Atom Scale Elemental Analysis
3D Atom Scale Crystal Structure Analysis
3D Analysis of Interfaces
Voltage Pulsed APT
Laser Pulsed APT
Field Ion Microscopy
 

Hi-resolution Analytical TEM

High-Resolution Analytical TEM
FEI Tecnai G2 F20 ST S/TEM
Room: E-178C
 
2D/3D Structural Imaging
Crystal Structure Analysis
Chemical State Analysis/Imaging
Elemental Analysis/Imaging
BF, DF, STEM HAADF
SAED, OIM-PED
EELS, EFTEM
EDS, EELS, EFTEM

Dual Beam FIB/SEM

DualBeam FIB/SEM
FEI Nova 200 NanoLab FIB/SEM
Room:E-178D
 
2D/3D Imaging
Micro-machining & Deposition
Site Specific Sample Preparation
2D/3D Elemental + Crystal Structure Analysis/Imaging
SE/BSE/SI, High-resolution SE/BSE
Ga FIB, Pt GIS
Nanomanipulator, Pt GIS, EBSD, EDS
EBSD, EDS

Analytical FEG-SEM

Analytical FEG-SEM
FEI Nova NanoSEM 230
Room: E-178P
 
2D Imaging
2D Elemental Analysis/Imaging
2D Crystal Structure Analysis/Imaging
 
SE/BSE, High-resolution SE/BSE
EDS
EBSD
 

Environmental SEM (ESEM)

Environmental SEM (ESEM)
FEI Quanta 200 ESEM
Room: E-178K
 
2D Imaging
2D Elemental Analysis/Imaging
Low pressure imaging/analysis
Environmental stages
SE, BSE
EDS
SE, BSE, EDS
cold and hot stages

Philips EM420 TEM

Imaging TEM
Philips EM420 120keV TEM
Room: E-161
 
2D Structural Imaging
Crystal Structure Analysis
Digital Imaging
 
BF, DF
SAED
Gatan slow scan CCD Camera
 

Surface & Thin Film Analysis

  Instrument Capabilities Operation Modes

X-Ray Photoelectron Spectrometry (XPS)

XPS Imaging Spectrometer
PHI 5000 Versaprobe Scanning XPS Microprobe with UPS
Room: E-178E
 
UHV compatible materials
Chemical Bond State Surface Spectroscopy
Work Function measurements
Compositional Depth Profiling
XPS, ARXPS
UPS
Ar Ion Sputter Gun
Five axis motorized stage

Scanning Auger Microscope

Scanning Auger Microscope
PHI 670xi Scanning Auger Nanoprobe
Room: E-178E
 
UHV compatible Metals, Semiconductors and Insulators
Auger Spectroscopy
Compositional Depth Profiling
Compositional Surface Mapping
FEG Electron Gun
Ar Ion Gun for Sputtering and Neutralization
5 axis specimen stage
Compucentric Zalar Rotation

Spectroscopic Ellipsometer

Spectroscopic Ellipsometer
J.A. Woollam Variable Angle Spectroscopic Ellipsometer
Room: E-180R
 
characterize surfaces, thin films, and microstructure
determine optical constants
determine film thicknesses
determine doping concentration
250nm to 2200nm spectral range
Heating Stage

 

Scanning Probe Microscope

Scanning Probe Microscope
Veeco Multimode Nanoscope III SPM with AFM, STM, MFM, SCM
Room: E-178M
 
   

Optical Microscope

Optical Microscope
Nikon Eclipse ME600 Digital Optical Microscope
Room: E-178K
 
   

Vibrational Spectroscopy

  Instrument Capabilities Operation Modes

Raman Spectrometer

Raman Spectrometer
Nicolet Almega XR Dispersive Raman spectrometer
Room: E-180V
 
   

Fourier Transform Infrared Spectrometer

Fourier Transform Infrared Spectrometer (FTIR)
Thermo Nicolet 6700 FTIR
Room: E-180Q
 
   

X-Ray Diffraction & Tomography

  Instrument Capabilities Operation Modes

Hi-resolution X-ray Diffractometer (HRXRD)

High Resolution X-ray Diffractometer (XRD)
Rigaku Ultima III XRD
Room: E-178N
 
   

X-Ray Tomography

X-Ray Microtomography
Skyscan 1172 High Resolution µ-CT 3D imaging system
Room: E-180V
 
   

Sample Preparation

  Instrument Capabilities Operation Modes

SEM Ion Etching & HR Coating System

SEM Ion Etching & HR Coating
Gatan 682 Precision Etching Coating System
Room: E-180N
 
   

TEM Ion Polishing System

TEM Ion Polishing System
Gatan 691 Precision Ion Polishing System
Room:E-180N