MDCL Instrumentation & Tools

Electron and Ion Microscopy


  Instrument Capabilities Operation Modes

3D Atom Probe Microscope

3D Atom Probe Microscope
Cameca LEAP 5000XS HR Atom Probe Microscope
Room: E-178B
 
Analysis of Metals, Semiconductors and Insulators
3D Atom Scale Elemental Analysis
3D Atom Scale Crystal Structure Analysis
3D Analysis of Interfaces
Voltage Pulsed APT
Laser Pulsed APT
Field Ion Microscopy
 

Hi-resolution Analytical TEM

High-Resolution Analytical TEM
FEI Tecnai G2 F20 ST S/TEM
Room: E-178C
 
2D/3D Structural Imaging
Crystal Structure Analysis
Chemical State Analysis/Imaging
Elemental Analysis/Imaging
BF, DF, STEM HAADF
SAED, OIM-PED
EELS, EFTEM
EDS, EELS, EFTEM

Dual Beam FIB/SEM

DualBeam FIB/SEM
FEI Nova 200 NanoLab FIB/SEM
Room:E-178D
 
2D/3D Imaging
Micro-machining & Deposition
Site Specific Sample Preparation
2D/3D Elemental + Crystal Structure Analysis/Imaging
SE/BSE/SI, High-resolution SE/BSE
Ga FIB, Pt GIS
Nanomanipulator, Pt GIS, EBSD, EDS
EBSD, EDS

Analytical FEG-SEM

Analytical FEG-SEM
FEI Nova NanoSEM 230
Room: E-178P
 
2D Imaging
2D Elemental Analysis/Imaging
2D Crystal Structure Analysis/Imaging
 
SE/BSE, High-resolution SE/BSE
EDS
EBSD
 

Environmental SEM (ESEM)

Environmental SEM (ESEM)
FEI Quanta 200 ESEM
Room: E-178K
 
2D Imaging
2D Elemental Analysis/Imaging
Low pressure imaging/analysis
Environmental stages
SE, BSE
EDS
SE, BSE, EDS
cold and hot stages

Surface & Thin Film Analysis

  Instrument Capabilities Operation Modes

X-Ray Photoelectron Spectrometry (XPS)

XPS Imaging Spectrometer
PHI 5000 Versaprobe Scanning XPS Microprobe with UPS
Room: E-178E
 
UHV compatible materials
Chemical Bond State Surface Spectroscopy
Work Function measurements
Compositional Depth Profiling
XPS, ARXPS
UPS
Ar Ion Sputter Gun
Five axis motorized stage

Spectroscopic Ellipsometer

Spectroscopic Ellipsometer
J.A. Woollam Variable Angle Spectroscopic Ellipsometer
Room: E-178M
 
characterize surfaces, thin films, and microstructure
determine optical constants
determine film thicknesses
determine doping concentration
250nm to 2200nm spectral range
Heating Stage

 

Scanning Probe Microscope

Scanning Probe Microscope
Veeco Multimode Nanoscope III SPM with AFM, STM, MFM, SCM
Room: E-178M
 
   

Optical Microscope

Optical Microscope
Nikon Eclipse ME600 Digital Optical Microscope
Room: E-178K
 
   

Vibrational Spectroscopy

  Instrument Capabilities Operation Modes

Fourier Transform Infrared Spectrometer

Fourier Transform Infrared Spectrometer (FTIR)
Thermo Nicolet 6700 FTIR
Room: E-178K
 
   

X-Ray Diffraction & Tomography


  Instrument Capabilities Operation Modes

Hi-resolution X-ray Diffractometer (HRXRD)

High Resolution X-ray Diffractometer (XRD)
Rigaku Ultima III XRD
Room: E-178N
 
   

Sample Preparation


  Instrument Capabilities Operation Modes

SEM Ion Etching & HR Coating System

SEM Ion Etching & HR Coating
Gatan 682 Precision Etching Coating System
Room: E-178K
 
   

Previously Managed Instruments

   

Imago LEAP 300X HR

Imago LEAP 300X HR [RETIRED, REPLACED BY CAMECA LEAP 5000XS]

Philips EM420 TEM

Philips EM420 120keV TEM [CURRENTLY MANAGED BY MTSE]

Scanning Auger Microscope

PHI 670xi Scanning Auger Nanoprobe [RETIRED]

Raman Spectrometer

Nicolet Almega XR Dispersive Raman spectrometer [RETIRED]

X-Ray Tomography

Skyscan 1172 High Resolution µ-CT 3D Imaging System [RETIRED]

TEM Ion Polishing System

Gatan 691 Precision Ion Polishing System [RETIRED]