MDCL Instrumentation & Tools

Usage Rates for Internal, External Non-Profit, and Commercial Users

All rates listed are hourly unless otherwise stated and are applied in 1-minute increments.

Instrument Scheduling

Electron and Ion Microscopy

	Instrument	Capabilities	Operation Modes
	3D Atom Probe Microscope Cameca LEAP 5000XS HR Atom Probe Microscope Room: E-178B	Analysis of Metals, Semiconductors and Insulators 3D Atom Scale Elemental Analysis 3D Atom Scale Crystal Structure Analysis 3D Analysis of Interfaces	Voltage Pulsed APT Laser Pulsed APT Field Ion Microscopy
	High-Resolution Analytical TEM TS Talos F200X G2 S/TEM Room: E-178E	2D/3D Structural Imaging Crystal Structure Analysis Elemental Analysis/Imaging	BF, DF, EDS, BF/DF/HAADF STEM, 4D STEM, Tomography
	DualBeam FIB/SEM TS Helios 5 PFIB Cxe Room: E-178D	2D/3D Imaging Micro-machining & Deposition Site Specific Sample Preparation 2D/3D Elemental + Crystal Structure Analysis/Imaging	SE/BSE/SI, High-resolution SE/BSE Ga FIB, Pt GIS Nanomanipulator, Pt GIS, EBSD, EDS
	Analytical FEG-SEM TS Apreo 2 S LoVac Room: E-178P	2D Imaging 2D Elemental Analysis/Imaging 2D Crystal Structure Analysis/Imaging	SE/BSE, High-resolution SE/BSE EDS EBSD
	Environmental SEM (ESEM) TS Quattro S ESEM Room: E-178E	2D Imaging 2D Elemental Analysis Low pressure	SE, BSE EDS SE, BSE, EDS
	Analytical TEM FEI Tecnai G2 F20 STS/TEM Room: E-178C	2D/3D Structural Imaging Crystal Structure Analysis Elemental Analysis/Imaging	BF, DF, SAED, EDS, STEM BF/DF/HAADF, OIM-PED

Surface & Thin Film Analysis

	Instrument	Capabilities	Operation Modes
	XPS Imaging Spectrometer PHI 5000 Versaprobe Scanning XPS Microprobe with UPS Room: E-178E	UHV compatible materials Chemical Bond State Surface Spectroscopy Work Function measurements Compositional Depth Profiling	XPS, ARXPS UPS Ar Ion Sputter Gun Five axis motorized stage
	Spectroscopic Ellipsometer J.A. Woollam Variable Angle Spectroscopic Ellipsometer Room: E-178K	characterize surfaces, thin films, and microstructure determine optical constants determine film thicknesses determine doping concentration	250nm to 2200nm spectral range Heating Stage
	Scanning Probe Microscope Veeco Multimode Nanoscope III SPM Room: E-178M	AFM, STM, MFM, SCM
	Optical Microscope Nikon Eclipse ME600 Digital Optical Microscope Room: E-178K

Sample Preparation

	Instrument	Capabilities	Operation Modes
	SEM Ion Etching & HR Coating Gatan 682 Precision Etching Coating System Room: E-178K

Previously Managed Instruments

	FEI Quanta 200 ESEM [RETIRED, REPLACED BY TS QUATTRO S ESEM]
	FEI Nova 200 NanoLab FIB/SEM[RETIRED, REPLACED BY TS Helios 5 PFIB Cxe]
	FEI Nova NanoSEM 230[RETIRED, REPLACED BY TS Apero 2 s LoVac]
	Rigaku Ultima III XRD[RETIRED]
	Imago LEAP 300X HR [RETIRED, REPLACED BY CAMECA LEAP 5000XS]
	Philips EM420 120keV TEM [CURRENTLY MANAGED BY MTSE]
	PHI 670xi Scanning Auger Nanoprobe [RETIRED]
	Nicolet Almega XR Dispersive Raman spectrometer [RETIRED]
	Nicolet 6700 Fourier Transform Infrared Spectrometer (FTIR) [RETIRED]
	Skyscan 1172 High Resolution µ-CT 3D Imaging System [RETIRED]
	Gatan 691 Precision Ion Polishing System [RETIRED]