Standard Operating Procedures:
- Heidelberg DWL-66 Laser Writer Short Manual
- Heidelberg DWL-66 Laser Writer Long Manual
- EVG 610 Mask Aligner
- Laurell WS-650Mz Spin Coater
- JEOL JSM 7001F SEM Imaging Short Manual
- XENOS XPG2 EBL Short Manual
- Reactive Ion Etcher (dielectric material)
- Reactive Ion Etcher (metal, using as dielectric backup)
- HP 61 Hot Plate
- UV Ozone Cleaner
- KLA-Tencor Profiler D-300
- ECP EBL Pattern Edit Manual
- ECP EBL Pattern User Manual
- Nanomaster Dual Ebeam Manual
- Trovato OLED system
- Oerlikon Ebeam system
- Oerlikon sputtering system
- Parylene Labcoter 2010
- West Bond 7476D Wirebonder